Fabrication and Integration of High-Quality CVD Graphene for Advanced NEMS Applications

This study presents a novel approach for the large-scale fabrication of defect-free suspended chemical vapor deposition (CVD) graphene membranes tailored for nanoelectromechanical systems (NEMS). By optimizing the growth and transfer processes, we achieve high-yield production of graphene membranes with exceptional uniformity and minimal structural imperfections. The fabricated membranes exhibit a narrow distribution of resonance frequencies and high quality factors, making them ideal for electromechanical studies. Our methodology leverages advanced CVD techniques and precise transfer protocols to ensure scalability and reproducibility. The resulting graphene-based NEMS devices demonstrate superior mechanical properties, including enhanced stiffness and low damping, suitable for applications in sensing, actuation, and quantum electromechanical systems. These findings pave the way for the integration of CVD graphene into next-generation NEMS platforms with consistent performance metrics.