Large Scale Fabrication of High-Quality Defect-free Suspended CVD Graphene Membranes For Electromechanical Studies 

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Large Scale Fabrication of High-Quality Defect-free Suspended CVD Graphene Membranes For Electromechanical Studies 

Hadi Arjmandi-Tash, et al, Large scale integration of CVD-graphene based NEMS with narrow distribution of resonance parameters, 2D Materials 4, 2, 025023, 2017